Semester | Mand. | Option | Filières |
x |
Lecture | 14 |
Exercises | 14 |
Study plan | Semester | Mand. | Option | Filières |
EDAM - Advanced Manufacturing 2020-21 | x | |||
EDMI - Microsystems and Microelectronics 2020-21 | x |
Cursus | Sem. | Type |
---|---|---|
Advanced Manufacturing | Opt. | |
Microsystems and Microelectronics | Opt. |
Microfabrication and nanofabrication are the basis of manufacturing for nearly all modern miniaturized systems that are ubiquitously used in our daily life. Examples include; computer chips and integrated sensors for monitoring our environment, cars, mobile phones, medical devices and more.
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen.
In this engineering course, we will go a step beyond classroom teaching to not only explain the basics of each fabrication step but also show you how it’s done through video sequences and zooming into the equipment.
Course Syllabus
Week 1: MEMS and cleanroom introduction
Week 2: Chemical vapour deposition (CVD)
Week 3: Physical vapour deposition (PVD)
Week 4: Lithography
Week 5: Dry etching
Week 6: Wet etching
Week 7: Metrology
microfabrication, cleanroom techniques, theory and visual demonstration by video sequences, quizzes.
basics of physics and chemistry
none
Examination:
Individual oral examination
held on December 3rd and 10th, 2020
(15h to 18h)
Contact person:
Claudio Gonnelli
claudio.gonnelli@epfl.ch
optionnel
optionnel
Cours
Lecture
Heure(s)
Hour(s)
H
H
Exercices
Exercises
Heure(s)
Hour(s)
H
H
Oral
Oral
Session libre
Session free
LIB
LIB
optionnel
optionnel
Cours
Lecture
Heure(s)
Hour(s)
H
H
Exercices
Exercises
Heure(s)
Hour(s)
H
H
Oral
Oral
Session libre
Session free
LIB
LIB
BALISES_TEXTES
BOOLEAN_Symbol
BaliseJS_debut
BaliseJS_fin
Balise_debut
Balise_fin
FO_debut
FO_fin
HTML_debut
HTML_fin
JS_debut
JS_fin
BALISE_BOLD
BOOLEAN_Symbol
BaliseJS_debut
\x5bb\x5d
BaliseJS_fin
\x5b\x2fb\x5d
Balise_debut
[b]
Balise_fin
[/b]
FO_debut
font-weight=bold
FO_fin
font-weight=normal
HTML_debut
<b>
HTML_fin
</b>
JS_debut
\x3cb\x3e
JS_fin
\x3c\x2fb\x3e
BALISE_ITALIC
BOOLEAN_Symbol
BaliseJS_debut
\x5bi\x5d
BaliseJS_fin
\x5b\x2fi\x5d
Balise_debut
[i]
Balise_fin
[/i]
FO_debut
font-style=italic
FO_fin
font-style=normal
HTML_debut
<i>
HTML_fin
</i>
JS_debut
\x3ci\x3e
JS_fin
\x3c\x2fi\x3e
BALISE_RED
BOOLEAN_Symbol
BaliseJS_debut
\x5bred\x5d
BaliseJS_fin
\x5b\x2fred\x5d
Balise_debut
[red]
Balise_fin
[/red]
FO_debut
color=#990033
FO_fin
color=black
HTML_debut
<span style="color:#990033;">
HTML_fin
</span>
JS_debut
\x3cspan style="color:#990033;"\x3e
JS_fin
\x3c\x2fspan\x3e
BALISE_TAB
BOOLEAN_Symbol
BaliseJS_debut
\x5btab\x5d
BaliseJS_fin
Balise_debut
[tab]
Balise_fin
FO_debut
[inline]=        
FO_fin
HTML_debut
<img src="/images/gestacplus/base/pixel.gif" width="40" height="1"/>
HTML_fin
JS_debut
\x3cimg src="\x2fimages\x2fgestacplus\x2fbase\x2fpixel.gif" width="40" height="1"\x2f\x3e
JS_fin
BALISE_LIST
BOOLEAN_Symbol
BaliseJS_debut
\x5bli\x5d
BaliseJS_fin
Balise_debut
[li]
Balise_fin
FO_debut
[inline]=•  
FO_fin
HTML_debut
•  
HTML_fin
JS_debut
\x26#x2022;\x26#160;\x26#160;
JS_fin
CODE5045487
BOOLEAN_Symbol
BaliseJS_debut
\x5b\x5d
BaliseJS_fin
Balise_debut
[]
Balise_fin
FO_debut
[inline]= 
FO_fin
HTML_debut
 
HTML_fin
JS_debut
\x26#160;
JS_fin
BALISE_GREEN
BOOLEAN_Symbol
BaliseJS_debut
\x5bgreen\x5d
BaliseJS_fin
\x5b\x2fgreen\x5d
Balise_debut
[green]
Balise_fin
[/green]
FO_debut
color=#008000
FO_fin
color=black
HTML_debut
<span style="color:#008000;">
HTML_fin
</span>
JS_debut
\x3cspan style="color:#008000;"\x3e
JS_fin
\x3c\x2fspan\x3e
CODE7508550
BOOLEAN_Symbol
BaliseJS_debut
\x5bblue\x5d
BaliseJS_fin
\x5b\x2fblue\x5d
Balise_debut
[blue]
Balise_fin
[/blue]
FO_debut
color=#0080FF
FO_fin
color=black
HTML_debut
<span style="color:#0080FF;">
HTML_fin
</span>
JS_debut
\x3cspan style="color:#0080FF;"\x3e
JS_fin
\x3c\x2fspan\x3e
BALISE_COURIER
BOOLEAN_Symbol
BaliseJS_debut
\x5bcourier\x5d
BaliseJS_fin
\x5b\x2fcourier\x5d
Balise_debut
[courier]
Balise_fin
[/courier]
FO_debut
font-family=Courier
FO_fin
font-family=
HTML_debut
<font style="font-family:Courier;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-family:Courier;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_SIZE20
BOOLEAN_Symbol
BaliseJS_debut
\x5b20\x5d
BaliseJS_fin
\x5b\x2f20\x5d
Balise_debut
[20]
Balise_fin
[/20]
FO_debut
font-size=20pt
FO_fin
font-size=
HTML_debut
<font style="font-size:20pt;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-size:20pt;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_SIZE16
BOOLEAN_Symbol
BaliseJS_debut
\x5b16\x5d
BaliseJS_fin
\x5b\x2f16\x5d
Balise_debut
[16]
Balise_fin
[/16]
FO_debut
font-size=16pt
FO_fin
font-size=
HTML_debut
<font style="font-size:16pt;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-size:16pt;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_SIZE12
BOOLEAN_Symbol
BaliseJS_debut
\x5b12\x5d
BaliseJS_fin
\x5b\x2f12\x5d
Balise_debut
[12]
Balise_fin
[/12]
FO_debut
font-size=12pt
FO_fin
font-size=
HTML_debut
<font style="font-size:12pt;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-size:12pt;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_SIZE8
BOOLEAN_Symbol
BaliseJS_debut
\x5b8\x5d
BaliseJS_fin
\x5b\x2f8\x5d
Balise_debut
[8]
Balise_fin
[/8]
FO_debut
font-size=8pt
FO_fin
font-size=
HTML_debut
<font style="font-size:8pt;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-size:8pt;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_BLACKBACK
BOOLEAN_Symbol
BaliseJS_debut
\x5bblackback\x5d
BaliseJS_fin
\x5b\x2fblackback\x5d
Balise_debut
[blackback]
Balise_fin
[/blackback]
FO_debut
background-color=black
FO_fin
background-color=white
HTML_debut
<span style="background-color:black;">
HTML_fin
</span>
JS_debut
\x3cspan style="background-color:black;"\x3e
JS_fin
\x3c\x2fspan\x3e
BALISE_WHITE
BOOLEAN_Symbol
BaliseJS_debut
\x5bwhite\x5d
BaliseJS_fin
\x5b\x2fwhite\x5d
Balise_debut
[white]
Balise_fin
[/white]
FO_debut
color=white
FO_fin
color=black
HTML_debut
<span style="color:white;">
HTML_fin
</span>
JS_debut
\x3cspan style="color:white;"\x3e
JS_fin
\x3c\x2fspan\x3e
CODE47534071
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bbeta\x5d
BaliseJS_fin
Balise_debut
[beta]
Balise_fin
FO_debut
[inline]=β
FO_fin
HTML_debut
β
HTML_fin
JS_debut
\x26#946;
JS_fin
CODE47534435
BOOLEAN_Symbol
1
BaliseJS_debut
\x5balpha\x5d
BaliseJS_fin
Balise_debut
[alpha]
Balise_fin
FO_debut
[inline]=α
FO_fin
HTML_debut
α
HTML_fin
JS_debut
\x26#945;
JS_fin
CODE47551722
BOOLEAN_Symbol
BaliseJS_debut
\x5bsub\x5d
BaliseJS_fin
\x5b\x2fsub\x5d
Balise_debut
[sub]
Balise_fin
[/sub]
FO_debut
vertical-align=sub
FO_fin
vertical-align=baseline
HTML_debut
<sub>
HTML_fin
</sub>
JS_debut
\x3csub\x3e
JS_fin
\x3c\x2fsub\x3e
CODE48535424
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bLAMBDA\x5d
BaliseJS_fin
Balise_debut
[LAMBDA]
Balise_fin
FO_debut
[inline]=Λ
FO_fin
HTML_debut
Λ
HTML_fin
JS_debut
\x26#923;
JS_fin
CODE48535666
BOOLEAN_Symbol
1
BaliseJS_debut
\x5blambda\x5d
BaliseJS_fin
Balise_debut
[lambda]
Balise_fin
FO_debut
[inline]=λ
FO_fin
HTML_debut
λ
HTML_fin
JS_debut
\x26#955;
JS_fin
CODE47551793
BOOLEAN_Symbol
BaliseJS_debut
\x5bsup\x5d
BaliseJS_fin
\x5b\x2fsup\x5d
Balise_debut
[sup]
Balise_fin
[/sup]
FO_debut
vertical-align=super
FO_fin
vertical-align=baseline
HTML_debut
<sup>
HTML_fin
</sup>
JS_debut
\x3csup\x3e
JS_fin
\x3c\x2fsup\x3e
CODE56031535
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bdelta\x5d
BaliseJS_fin
Balise_debut
[delta]
Balise_fin
FO_debut
[inline]=δ
FO_fin
HTML_debut
δ
HTML_fin
JS_debut
\x26#948;
JS_fin
CODE56073309
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bpi\x5d
BaliseJS_fin
Balise_debut
[pi]
Balise_fin
FO_debut
[inline]=π
FO_fin
HTML_debut
π
HTML_fin
JS_debut
\x26#960;
JS_fin
CODE56074095
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bDELTA\x5d
BaliseJS_fin
Balise_debut
[DELTA]
Balise_fin
FO_debut
[inline]=Δ
FO_fin
HTML_debut
Δ
HTML_fin
JS_debut
\x26#916;
JS_fin
CODE56074172
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bMU\x5d
BaliseJS_fin
Balise_debut
[MU]
Balise_fin
FO_debut
[inline]=Μ
FO_fin
HTML_debut
Μ
HTML_fin
JS_debut
\x26#924;
JS_fin
CODE56074264
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bPI\x5d
BaliseJS_fin
Balise_debut
[PI]
Balise_fin
FO_debut
[inline]=Π
FO_fin
HTML_debut
Π
HTML_fin
JS_debut
\x26#928;
JS_fin
CODE56074328
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bSIGMA\x5d
BaliseJS_fin
Balise_debut
[SIGMA]
Balise_fin
FO_debut
[inline]=Σ
FO_fin
HTML_debut
Σ
HTML_fin
JS_debut
\x26#931;
JS_fin
CODE56075056
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bALPHA\x5d
BaliseJS_fin
Balise_debut
[ALPHA]
Balise_fin
FO_debut
[inline]=Α
FO_fin
HTML_debut
Α
HTML_fin
JS_debut
\x26#913;
JS_fin
CODE56075186
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bBETA\x5d
BaliseJS_fin
Balise_debut
[BETA]
Balise_fin
FO_debut
[inline]=Β
FO_fin
HTML_debut
Β
HTML_fin
JS_debut
\x26#914;
JS_fin
BALISE_SYMBOL
BOOLEAN_Symbol
BaliseJS_debut
\x5bsymbol\x5d
BaliseJS_fin
\x5b\x2fsymbol\x5d
Balise_debut
[symbol]
Balise_fin
[/symbol]
FO_debut
font-family=Symbol
FO_fin
font-family=
HTML_debut
<font style="font-family:Symbol;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-family:Symbol;"\x3e
JS_fin
\x3c\x2ffont\x3e
CODE56072935
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bmu\x5d
BaliseJS_fin
Balise_debut
[mu]
Balise_fin
FO_debut
[inline]=μ
FO_fin
HTML_debut
μ
HTML_fin
JS_debut
\x26#956;
JS_fin
CODE56073842
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bsigma\x5d
BaliseJS_fin
Balise_debut
[sigma]
Balise_fin
FO_debut
[inline]=σ
FO_fin
HTML_debut
σ
HTML_fin
JS_debut
\x26#963;
JS_fin
CODE68199232
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bphi\x5d
BaliseJS_fin
Balise_debut
[phi]
Balise_fin
FO_debut
[inline]=φ
FO_fin
HTML_debut
φ
HTML_fin
JS_debut
\x26#966;
JS_fin
CODE68199285
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bPHI\x5d
BaliseJS_fin
Balise_debut
[PHI]
Balise_fin
FO_debut
[inline]=Φ
FO_fin
HTML_debut
Φ
HTML_fin
JS_debut
\x26#934;
JS_fin
CODE68199991
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bgamma\x5d
BaliseJS_fin
Balise_debut
[gamma]
Balise_fin
FO_debut
[inline]=γ
FO_fin
HTML_debut
γ
HTML_fin
JS_debut
\x26#947;
JS_fin
CODE68200031
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bGAMMA\x5d
BaliseJS_fin
Balise_debut
[GAMMA]
Balise_fin
FO_debut
[inline]=Γ
FO_fin
HTML_debut
Γ
HTML_fin
JS_debut
\x26#915;
JS_fin
CODE68200077
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bomega\x5d
BaliseJS_fin
Balise_debut
[omega]
Balise_fin
FO_debut
[inline]=ω
FO_fin
HTML_debut
ω
HTML_fin
JS_debut
\x26#969;
JS_fin
CODE68200150
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bOMEGA\x5d
BaliseJS_fin
Balise_debut
[OMEGA]
Balise_fin
FO_debut
[inline]=Ω
FO_fin
HTML_debut
Ω
HTML_fin
JS_debut
\x26#937;
JS_fin
CODE72092691
BOOLEAN_Symbol
BaliseJS_debut
\x5beta\x5d
BaliseJS_fin
Balise_debut
[eta]
Balise_fin
FO_debut
[inline]=η
FO_fin
HTML_debut
η
HTML_fin
JS_debut
\x26#951;
JS_fin
CODE72092805
BOOLEAN_Symbol
BaliseJS_debut
\x5bETA\x5d
BaliseJS_fin
Balise_debut
[ETA]
Balise_fin
FO_debut
[inline]=Η
FO_fin
HTML_debut
Η
HTML_fin
JS_debut
\x26#919;
JS_fin
BALISE_SOULIGNER
BOOLEAN_Symbol
BaliseJS_debut
\x5bu\x5d
BaliseJS_fin
\x5b\x2fu\x5d
Balise_debut
[u]
Balise_fin
[/u]
FO_debut
text-decoration=underline
FO_fin
text-decoration=none
HTML_debut
<u>
HTML_fin
</u>
JS_debut
\x3cu\x3e
JS_fin
\x3c\x2fu\x3e
CODE72092388
BOOLEAN_Symbol
BaliseJS_debut
\x5bpsi\x5d
BaliseJS_fin
Balise_debut
[psi]
Balise_fin
FO_debut
[inline]=ψ
FO_fin
HTML_debut
ψ
HTML_fin
JS_debut
\x26#968;
JS_fin
CODE72092541
BOOLEAN_Symbol
BaliseJS_debut
\x5bPSI\x5d
BaliseJS_fin
Balise_debut
[PSI]
Balise_fin
FO_debut
[inline]=Ψ
FO_fin
HTML_debut
Ψ
HTML_fin
JS_debut
\x26#936;
JS_fin
CODE140502511
BOOLEAN_Symbol
1
BaliseJS_debut
\x5brho\x5d
BaliseJS_fin
Balise_debut
[rho]
Balise_fin
FO_debut
[inline]=ρ
FO_fin
HTML_debut
ρ
HTML_fin
JS_debut
\x26#961;
JS_fin
CODE140504636
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bRHO\x5d
BaliseJS_fin
Balise_debut
[RHO]
Balise_fin
FO_debut
[inline]=Ρ
FO_fin
HTML_debut
Ρ
HTML_fin
JS_debut
\x26#929;
JS_fin
CODE148292791
BOOLEAN_Symbol
BaliseJS_debut
\x5bepsilon\x5d
BaliseJS_fin
Balise_debut
[epsilon]
Balise_fin
FO_debut
[inline]=ε
FO_fin
HTML_debut
ε
HTML_fin
JS_debut
\x26#949;
JS_fin
CODE169976220
BOOLEAN_Symbol
BaliseJS_debut
\x5blig\x5d
BaliseJS_fin
Balise_debut
[lig]
Balise_fin
FO_debut
[inline]=›  
FO_fin
HTML_debut
›  
HTML_fin
JS_debut
\x26#x203A;\x26#160;\x26#160;
JS_fin
CODE148292899
BOOLEAN_Symbol
BaliseJS_debut
\x5bEPSILON\x5d
BaliseJS_fin
Balise_debut
[EPSILON]
Balise_fin
FO_debut
[inline]=Ε
FO_fin
HTML_debut
Ε
HTML_fin
JS_debut
\x26#917;
JS_fin
BALISETXT_SAUT
BOOLEAN_Symbol
BaliseJS_debut
\x5bbr\x2f\x5d
BaliseJS_fin
Balise_debut
[br/]
Balise_fin
FO_debut
FO_fin
HTML_debut
<br/>
HTML_fin
JS_debut
\x3cbr\x2f\x3e
JS_fin