Semester | Mand. | Option | Filières |
x |
Lecture | 16 |
Exercises | 8 |
Practical work | 4 |
Study plan | Semester | Mand. | Option | Filières |
EDMI - Microsystems and Microelectronics 2019-20 | x |
Cursus | Sem. | Type |
---|---|---|
Microsystems and Microelectronics | Obl. |
The course aims to present most advanced micro and nanofabrication methods that go beyond the well established techniques such as lithography and thin film processing. These new methods are emerging and are useful for PhD students to be aware of in order to design and fabricate novel micro and nanosystems, involving new, functional materials, and achieveing resolutions, shape and throughput that are of importance for the target application. Both techniques that are rather used as rapid prototyping as well as scalable method for high throughput manufacturing will be addressed.
A list of topics that will be shown in the course is shown below. The topics will be updated in time to address also the most relevant and timely issues related to advanced micro and nanomanufacturing.
Guest Professors from other academic institutions will complement the lecture to give insight with first-hands experience to share with the students. In this edition, following three experts have confirmed to take part:
Prof. Massimo Mastrangeli (TU Delft), Prof. Francesc Perez-Murano (CNM Barcelona), Prof. Karl Bohringer (U-Washington)
List of topics:
Top-down fabrication: a) Fabrication through stencil, b) inkjet printing, c) micro 3D printing incluiding 2-photon lithography, d) (thermal )scanning probe lithography
Bottom-up fabrication: a) principles of self-assembly, b) capillary self-assembly, c) fluidic self-assembly, d) capillary assembly of nanoparticles
The course starts by presenting a map of currently available options for fabricating micro- and nanosystems, which includes both established techniques (electron beam lithography, nano-imprint lithogrpahy), covered in prior courses, and non-standard or advanced ones. This provides a recapitulative bridge to the students' background before focusing on the core of the course, which is the latter techniques.
We then proceed by introducing the advanced techiques in details. For each technique, a brief overview about history and background theory is provided, before focusing on recent developments and applications. The relative place of each technique with respect to the map is emphasized, so that advantages, limitations and complementarities are evidenced.
The second part of the course focuses on techniques that rely on the contactless and/or unsupervised placement of micro- or nanocomponents within a pre-existing templating substrate, i.e. where the structure arises from the directed organization of the constituting components - a family of approaches that can be broadly defined as "self-assembly". A theoretical framework inspired by equilibrium thermodynamics is briefly presented, before exemplifying three main applications within this family, namely: the integration of 2D microelectronic systems and self-folding of 3D MEMS by capillary self-alignment, the fluidic self-assembly of 3D systems including polymeric, liquid-filled microcapsules, and the topographically-templated capillary assembly of nanoparticles.
Another topic of the course is a combination of top-down and bottom using directed self-assembly (DSA) of block copolymers. It is emerging as a suitable possibility for high volume manufacturing of nanostructures and nanodevices. It is strongly being considered as a complementary nanopatterning technique by the semiconductor industry. DSA takes advantage of the properties of block co-polymers to self assembly, resulting in patterns with characteristic dimensions determined by the size of the molecules. In this way, resolution is only dictated by the molecular weight. It will be presented the main aspects of state-of-the art DSA including: materials, processing details, kinetics of self-assembly and applications. Special attention will be devoted to the creation of the guiding patterns that allows to position and orientate the molecules in the correct position.
MEMS, NEMS, self-assembly, additive manufacturing, printing nanofabrication
Microfabrication, basic physics, chemistry, engineering and material science
Madou, MEMS MOOC
obligatoire
obligatoire
Cours
Lecture
Heure(s)
Hour(s)
H
H
Exercices
Exercises
Heure(s)
Hour(s)
H
H
TP
Practical work
Heure(s)
Hour(s)
H
H
Multiple
Multiple
Session libre
Session free
LIB
LIB
BALISES_TEXTES
BOOLEAN_Symbol
BaliseJS_debut
BaliseJS_fin
Balise_debut
Balise_fin
FO_debut
FO_fin
HTML_debut
HTML_fin
JS_debut
JS_fin
BALISE_BOLD
BOOLEAN_Symbol
BaliseJS_debut
\x5bb\x5d
BaliseJS_fin
\x5b\x2fb\x5d
Balise_debut
[b]
Balise_fin
[/b]
FO_debut
font-weight=bold
FO_fin
font-weight=normal
HTML_debut
<b>
HTML_fin
</b>
JS_debut
\x3cb\x3e
JS_fin
\x3c\x2fb\x3e
BALISE_ITALIC
BOOLEAN_Symbol
BaliseJS_debut
\x5bi\x5d
BaliseJS_fin
\x5b\x2fi\x5d
Balise_debut
[i]
Balise_fin
[/i]
FO_debut
font-style=italic
FO_fin
font-style=normal
HTML_debut
<i>
HTML_fin
</i>
JS_debut
\x3ci\x3e
JS_fin
\x3c\x2fi\x3e
BALISE_RED
BOOLEAN_Symbol
BaliseJS_debut
\x5bred\x5d
BaliseJS_fin
\x5b\x2fred\x5d
Balise_debut
[red]
Balise_fin
[/red]
FO_debut
color=#990033
FO_fin
color=black
HTML_debut
<span style="color:#990033;">
HTML_fin
</span>
JS_debut
\x3cspan style="color:#990033;"\x3e
JS_fin
\x3c\x2fspan\x3e
BALISE_TAB
BOOLEAN_Symbol
BaliseJS_debut
\x5btab\x5d
BaliseJS_fin
Balise_debut
[tab]
Balise_fin
FO_debut
[inline]=        
FO_fin
HTML_debut
<img src="/images/gestacplus/base/pixel.gif" width="40" height="1"/>
HTML_fin
JS_debut
\x3cimg src="\x2fimages\x2fgestacplus\x2fbase\x2fpixel.gif" width="40" height="1"\x2f\x3e
JS_fin
BALISE_LIST
BOOLEAN_Symbol
BaliseJS_debut
\x5bli\x5d
BaliseJS_fin
Balise_debut
[li]
Balise_fin
FO_debut
[inline]=•  
FO_fin
HTML_debut
•  
HTML_fin
JS_debut
\x26#x2022;\x26#160;\x26#160;
JS_fin
CODE5045487
BOOLEAN_Symbol
BaliseJS_debut
\x5b\x5d
BaliseJS_fin
Balise_debut
[]
Balise_fin
FO_debut
[inline]= 
FO_fin
HTML_debut
 
HTML_fin
JS_debut
\x26#160;
JS_fin
BALISE_GREEN
BOOLEAN_Symbol
BaliseJS_debut
\x5bgreen\x5d
BaliseJS_fin
\x5b\x2fgreen\x5d
Balise_debut
[green]
Balise_fin
[/green]
FO_debut
color=#008000
FO_fin
color=black
HTML_debut
<span style="color:#008000;">
HTML_fin
</span>
JS_debut
\x3cspan style="color:#008000;"\x3e
JS_fin
\x3c\x2fspan\x3e
CODE7508550
BOOLEAN_Symbol
BaliseJS_debut
\x5bblue\x5d
BaliseJS_fin
\x5b\x2fblue\x5d
Balise_debut
[blue]
Balise_fin
[/blue]
FO_debut
color=#0080FF
FO_fin
color=black
HTML_debut
<span style="color:#0080FF;">
HTML_fin
</span>
JS_debut
\x3cspan style="color:#0080FF;"\x3e
JS_fin
\x3c\x2fspan\x3e
BALISE_COURIER
BOOLEAN_Symbol
BaliseJS_debut
\x5bcourier\x5d
BaliseJS_fin
\x5b\x2fcourier\x5d
Balise_debut
[courier]
Balise_fin
[/courier]
FO_debut
font-family=Courier
FO_fin
font-family=
HTML_debut
<font style="font-family:Courier;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-family:Courier;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_SIZE20
BOOLEAN_Symbol
BaliseJS_debut
\x5b20\x5d
BaliseJS_fin
\x5b\x2f20\x5d
Balise_debut
[20]
Balise_fin
[/20]
FO_debut
font-size=20pt
FO_fin
font-size=
HTML_debut
<font style="font-size:20pt;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-size:20pt;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_SIZE16
BOOLEAN_Symbol
BaliseJS_debut
\x5b16\x5d
BaliseJS_fin
\x5b\x2f16\x5d
Balise_debut
[16]
Balise_fin
[/16]
FO_debut
font-size=16pt
FO_fin
font-size=
HTML_debut
<font style="font-size:16pt;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-size:16pt;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_SIZE12
BOOLEAN_Symbol
BaliseJS_debut
\x5b12\x5d
BaliseJS_fin
\x5b\x2f12\x5d
Balise_debut
[12]
Balise_fin
[/12]
FO_debut
font-size=12pt
FO_fin
font-size=
HTML_debut
<font style="font-size:12pt;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-size:12pt;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_SIZE8
BOOLEAN_Symbol
BaliseJS_debut
\x5b8\x5d
BaliseJS_fin
\x5b\x2f8\x5d
Balise_debut
[8]
Balise_fin
[/8]
FO_debut
font-size=8pt
FO_fin
font-size=
HTML_debut
<font style="font-size:8pt;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-size:8pt;"\x3e
JS_fin
\x3c\x2ffont\x3e
BALISE_BLACKBACK
BOOLEAN_Symbol
BaliseJS_debut
\x5bblackback\x5d
BaliseJS_fin
\x5b\x2fblackback\x5d
Balise_debut
[blackback]
Balise_fin
[/blackback]
FO_debut
background-color=black
FO_fin
background-color=white
HTML_debut
<span style="background-color:black;">
HTML_fin
</span>
JS_debut
\x3cspan style="background-color:black;"\x3e
JS_fin
\x3c\x2fspan\x3e
BALISE_WHITE
BOOLEAN_Symbol
BaliseJS_debut
\x5bwhite\x5d
BaliseJS_fin
\x5b\x2fwhite\x5d
Balise_debut
[white]
Balise_fin
[/white]
FO_debut
color=white
FO_fin
color=black
HTML_debut
<span style="color:white;">
HTML_fin
</span>
JS_debut
\x3cspan style="color:white;"\x3e
JS_fin
\x3c\x2fspan\x3e
CODE47534071
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bbeta\x5d
BaliseJS_fin
Balise_debut
[beta]
Balise_fin
FO_debut
[inline]=β
FO_fin
HTML_debut
β
HTML_fin
JS_debut
\x26#946;
JS_fin
CODE47534435
BOOLEAN_Symbol
1
BaliseJS_debut
\x5balpha\x5d
BaliseJS_fin
Balise_debut
[alpha]
Balise_fin
FO_debut
[inline]=α
FO_fin
HTML_debut
α
HTML_fin
JS_debut
\x26#945;
JS_fin
CODE47551722
BOOLEAN_Symbol
BaliseJS_debut
\x5bsub\x5d
BaliseJS_fin
\x5b\x2fsub\x5d
Balise_debut
[sub]
Balise_fin
[/sub]
FO_debut
vertical-align=sub
FO_fin
vertical-align=baseline
HTML_debut
<sub>
HTML_fin
</sub>
JS_debut
\x3csub\x3e
JS_fin
\x3c\x2fsub\x3e
CODE48535424
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bLAMBDA\x5d
BaliseJS_fin
Balise_debut
[LAMBDA]
Balise_fin
FO_debut
[inline]=Λ
FO_fin
HTML_debut
Λ
HTML_fin
JS_debut
\x26#923;
JS_fin
CODE48535666
BOOLEAN_Symbol
1
BaliseJS_debut
\x5blambda\x5d
BaliseJS_fin
Balise_debut
[lambda]
Balise_fin
FO_debut
[inline]=λ
FO_fin
HTML_debut
λ
HTML_fin
JS_debut
\x26#955;
JS_fin
CODE47551793
BOOLEAN_Symbol
BaliseJS_debut
\x5bsup\x5d
BaliseJS_fin
\x5b\x2fsup\x5d
Balise_debut
[sup]
Balise_fin
[/sup]
FO_debut
vertical-align=super
FO_fin
vertical-align=baseline
HTML_debut
<sup>
HTML_fin
</sup>
JS_debut
\x3csup\x3e
JS_fin
\x3c\x2fsup\x3e
CODE56031535
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bdelta\x5d
BaliseJS_fin
Balise_debut
[delta]
Balise_fin
FO_debut
[inline]=δ
FO_fin
HTML_debut
δ
HTML_fin
JS_debut
\x26#948;
JS_fin
CODE56073309
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bpi\x5d
BaliseJS_fin
Balise_debut
[pi]
Balise_fin
FO_debut
[inline]=π
FO_fin
HTML_debut
π
HTML_fin
JS_debut
\x26#960;
JS_fin
CODE56074095
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bDELTA\x5d
BaliseJS_fin
Balise_debut
[DELTA]
Balise_fin
FO_debut
[inline]=Δ
FO_fin
HTML_debut
Δ
HTML_fin
JS_debut
\x26#916;
JS_fin
CODE56074172
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bMU\x5d
BaliseJS_fin
Balise_debut
[MU]
Balise_fin
FO_debut
[inline]=Μ
FO_fin
HTML_debut
Μ
HTML_fin
JS_debut
\x26#924;
JS_fin
CODE56074264
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bPI\x5d
BaliseJS_fin
Balise_debut
[PI]
Balise_fin
FO_debut
[inline]=Π
FO_fin
HTML_debut
Π
HTML_fin
JS_debut
\x26#928;
JS_fin
CODE56074328
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bSIGMA\x5d
BaliseJS_fin
Balise_debut
[SIGMA]
Balise_fin
FO_debut
[inline]=Σ
FO_fin
HTML_debut
Σ
HTML_fin
JS_debut
\x26#931;
JS_fin
CODE56075056
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bALPHA\x5d
BaliseJS_fin
Balise_debut
[ALPHA]
Balise_fin
FO_debut
[inline]=Α
FO_fin
HTML_debut
Α
HTML_fin
JS_debut
\x26#913;
JS_fin
CODE56075186
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bBETA\x5d
BaliseJS_fin
Balise_debut
[BETA]
Balise_fin
FO_debut
[inline]=Β
FO_fin
HTML_debut
Β
HTML_fin
JS_debut
\x26#914;
JS_fin
BALISE_SYMBOL
BOOLEAN_Symbol
BaliseJS_debut
\x5bsymbol\x5d
BaliseJS_fin
\x5b\x2fsymbol\x5d
Balise_debut
[symbol]
Balise_fin
[/symbol]
FO_debut
font-family=Symbol
FO_fin
font-family=
HTML_debut
<font style="font-family:Symbol;">
HTML_fin
</font>
JS_debut
\x3cfont style="font-family:Symbol;"\x3e
JS_fin
\x3c\x2ffont\x3e
CODE56072935
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bmu\x5d
BaliseJS_fin
Balise_debut
[mu]
Balise_fin
FO_debut
[inline]=μ
FO_fin
HTML_debut
μ
HTML_fin
JS_debut
\x26#956;
JS_fin
CODE56073842
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bsigma\x5d
BaliseJS_fin
Balise_debut
[sigma]
Balise_fin
FO_debut
[inline]=σ
FO_fin
HTML_debut
σ
HTML_fin
JS_debut
\x26#963;
JS_fin
CODE68199232
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bphi\x5d
BaliseJS_fin
Balise_debut
[phi]
Balise_fin
FO_debut
[inline]=φ
FO_fin
HTML_debut
φ
HTML_fin
JS_debut
\x26#966;
JS_fin
CODE68199285
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bPHI\x5d
BaliseJS_fin
Balise_debut
[PHI]
Balise_fin
FO_debut
[inline]=Φ
FO_fin
HTML_debut
Φ
HTML_fin
JS_debut
\x26#934;
JS_fin
CODE68199991
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bgamma\x5d
BaliseJS_fin
Balise_debut
[gamma]
Balise_fin
FO_debut
[inline]=γ
FO_fin
HTML_debut
γ
HTML_fin
JS_debut
\x26#947;
JS_fin
CODE68200031
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bGAMMA\x5d
BaliseJS_fin
Balise_debut
[GAMMA]
Balise_fin
FO_debut
[inline]=Γ
FO_fin
HTML_debut
Γ
HTML_fin
JS_debut
\x26#915;
JS_fin
CODE68200077
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bomega\x5d
BaliseJS_fin
Balise_debut
[omega]
Balise_fin
FO_debut
[inline]=ω
FO_fin
HTML_debut
ω
HTML_fin
JS_debut
\x26#969;
JS_fin
CODE68200150
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bOMEGA\x5d
BaliseJS_fin
Balise_debut
[OMEGA]
Balise_fin
FO_debut
[inline]=Ω
FO_fin
HTML_debut
Ω
HTML_fin
JS_debut
\x26#937;
JS_fin
CODE72092691
BOOLEAN_Symbol
BaliseJS_debut
\x5beta\x5d
BaliseJS_fin
Balise_debut
[eta]
Balise_fin
FO_debut
[inline]=η
FO_fin
HTML_debut
η
HTML_fin
JS_debut
\x26#951;
JS_fin
CODE72092805
BOOLEAN_Symbol
BaliseJS_debut
\x5bETA\x5d
BaliseJS_fin
Balise_debut
[ETA]
Balise_fin
FO_debut
[inline]=Η
FO_fin
HTML_debut
Η
HTML_fin
JS_debut
\x26#919;
JS_fin
BALISE_SOULIGNER
BOOLEAN_Symbol
BaliseJS_debut
\x5bu\x5d
BaliseJS_fin
\x5b\x2fu\x5d
Balise_debut
[u]
Balise_fin
[/u]
FO_debut
text-decoration=underline
FO_fin
text-decoration=none
HTML_debut
<u>
HTML_fin
</u>
JS_debut
\x3cu\x3e
JS_fin
\x3c\x2fu\x3e
CODE72092388
BOOLEAN_Symbol
BaliseJS_debut
\x5bpsi\x5d
BaliseJS_fin
Balise_debut
[psi]
Balise_fin
FO_debut
[inline]=ψ
FO_fin
HTML_debut
ψ
HTML_fin
JS_debut
\x26#968;
JS_fin
CODE72092541
BOOLEAN_Symbol
BaliseJS_debut
\x5bPSI\x5d
BaliseJS_fin
Balise_debut
[PSI]
Balise_fin
FO_debut
[inline]=Ψ
FO_fin
HTML_debut
Ψ
HTML_fin
JS_debut
\x26#936;
JS_fin
CODE140502511
BOOLEAN_Symbol
1
BaliseJS_debut
\x5brho\x5d
BaliseJS_fin
Balise_debut
[rho]
Balise_fin
FO_debut
[inline]=ρ
FO_fin
HTML_debut
ρ
HTML_fin
JS_debut
\x26#961;
JS_fin
CODE140504636
BOOLEAN_Symbol
1
BaliseJS_debut
\x5bRHO\x5d
BaliseJS_fin
Balise_debut
[RHO]
Balise_fin
FO_debut
[inline]=Ρ
FO_fin
HTML_debut
Ρ
HTML_fin
JS_debut
\x26#929;
JS_fin
CODE148292791
BOOLEAN_Symbol
BaliseJS_debut
\x5bepsilon\x5d
BaliseJS_fin
Balise_debut
[epsilon]
Balise_fin
FO_debut
[inline]=ε
FO_fin
HTML_debut
ε
HTML_fin
JS_debut
\x26#949;
JS_fin
CODE169976220
BOOLEAN_Symbol
BaliseJS_debut
\x5blig\x5d
BaliseJS_fin
Balise_debut
[lig]
Balise_fin
FO_debut
[inline]=›  
FO_fin
HTML_debut
›  
HTML_fin
JS_debut
\x26#x203A;\x26#160;\x26#160;
JS_fin
CODE148292899
BOOLEAN_Symbol
BaliseJS_debut
\x5bEPSILON\x5d
BaliseJS_fin
Balise_debut
[EPSILON]
Balise_fin
FO_debut
[inline]=Ε
FO_fin
HTML_debut
Ε
HTML_fin
JS_debut
\x26#917;
JS_fin
BALISETXT_SAUT
BOOLEAN_Symbol
BaliseJS_debut
\x5bbr\x2f\x5d
BaliseJS_fin
Balise_debut
[br/]
Balise_fin
FO_debut
FO_fin
HTML_debut
<br/>
HTML_fin
JS_debut
\x3cbr\x2f\x3e
JS_fin