110 http://isa.epfl.ch/imoniteur_ISAP/ itffichecours.txt?path=EPFL.Etu.FicheCours.HeaderFR itffichecours.txt?path=EPFL.Etu.FicheCours.GlobalNav_js fr 2026 84482813 2936295 84482813 2840683608 2840683608 0 1 Mineurs MINEUR !itffichecours.htm?ww_i_matiere=2343840776&ww_x_anneeAcad=2840683608&ww_i_section=84482813&ww_i_niveau=2936295 1696552884 1696552963 2025-2026 COURSE BOOKLET MICRO-428 Metrology Metrology Lecturers Bruschini Claudio, Charbon Edoardo, Fantner Georg Language of teaching English Cursus Computational and Quantitative Biology (edoc)(2025-2026, EDCB 2025-26)
Microengineering minor(2025-2026, Mineur : Microtechnique 2025-26)
Microengineering(2025-2026, MT - Master 2024)
Microengineering(2025-2026, MT - Master 2025)
Minor in Imaging(2025-2026, Mineur : Imaging 2025-26)
Minor in Quantum Science and Engineering(2025-2026, Mineur : Science et ingénierie quantiques 2025-26)
Quantum Science and Engineering(2025-2026, SIQ - 2024)
Quantum Science and Engineering(2025-2026, SIQ - 2025)
Space Technologies minor(2025-2026, Mineur : Technologies spatiales 2025-26)
SemesterMand.OptionFilières
x
Ex
MA2, MA4xA B
MA2, MA4xB
 Credits 3 Session Summer Workload 90h Exam Written Number of positions Semester Spring Weeks 14 Hours 3 weekly
Courses 2 weekly
Exercises 1 weekly
Study planSemesterMand.OptionFilières
EDCB - Biologie computationnelle et quantitative 2025-26x
Microtechnique 2025-26MA2xA B
Microtechnique 2025-26MA4xA B
Mineur : Imaging 2025-26Ex
Mineur : Microtechnique 2025-26Ex
Mineur : Science et ingénierie quantiques 2025-26Ex
Mineur : Technologies spatiales 2025-26Ex
Science et ingénierie quantiques 2025-26MA2xB
Science et ingénierie quantiques 2025-26MA4xB
Cursus Sem. Type
Computational and Quantitative Biology Opt.
Microengineering minor E Opt.
Microtechnics MA2, MA4 Opt.
Minor in Imaging E Opt.
Minor in Quantum Science and Engineering E Opt.
Quantum Science and Engineering MA2, MA4 Opt.
Space Technologies minor E Opt.
Summary The course deals with the concept of measuring in different domains, particularly in the electrical, optical, and microscale domains. The course will end with a perspective on quantum measurements, which could trigger the ultimate revolution in metrology. Content

The course deals with the concept of measuring in different domains, particularly in the electrical, optical, and microscale domains. The concept of precision, accuracy, and resolution will be introduced early in the course with an embedded course on statistics, which provides the basics required to understand how proper measurements ought to be performed. Subsequently, the course will introduce electrical, optical, and mechanical metrology techniques dealing with intrinsic and extrinsic limitations of the measurement. The course will end with a perspective on quantum measurements, which could trigger the ultimate revolution in metrology. Homework will be used as a means to practice the concepts learnt in class.

Syllabus

  • Classical metrology
  • Basic statistics
  • Electrical metrology
  • Optical microscopy
  • Optical imaging
  • AFM
  • SEM
  • Quantum metrology
 Keywords

Accuracy, precision, resolution, reproducibility, reliability, fidelity of the measurement

 Learning Prerequisites Required courses

Basic mathematics/physics

 Recommended courses

Design of experiments

 Learning Outcomes By the end of the course, the student must be able to:
  • Develop measurement setups that yield reproducible results
  • Analyze the accuracy and precision of a measurement for a certain resolution
  • Interpret the quality of data from measurements
 Transversal skills
  • Demonstrate the capacity for critical thinking
 Teaching methods

Ex cathedra, exercises and homeworks. Q&A during lectures.

 Expected student activities

In-class presence and active participation strongly encouraged.

 Assessment methods

Self-assessment (ungraded homework, exercise session); final exam during exam sessions.

 Supervision Office hours Yes Assistant.e.s Yes Resources Notes/Handbook

On Moodle: handouts of current year.

 Moodle Link Prerequisite for

MICRO-429 Metrology Practicals

 Microtechnique, 2025-2026, Master semestre 2 Microengineering, 2025-2026, Master semester 2 Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Master semestre 2 MA2 ETE Master semester 2 MA2 Microtechnique MT Microengineering MT
Microtechnique MT Microengineering MT
A B optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
Microtechnique, 2025-2026, Master semestre 4 Microengineering, 2025-2026, Master semester 4 Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Master semestre 4 MA4 ETE Master semester 4 MA4 Microtechnique MT Microengineering MT
Microtechnique MT Microengineering MT
A B optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
Science et ingénierie quantiques, 2025-2026, Master semestre 2 Quantum Science and Engineering, 2025-2026, Master semester 2 Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Master semestre 2 MA2 ETE Master semester 2 MA2 Science et ingénierie quantiques SIQ Quantum Science and Engineering SIQ
Science et ingénierie quantiques SIQ Quantum Science and Engineering SIQ
B optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
Science et ingénierie quantiques, 2025-2026, Master semestre 4 Quantum Science and Engineering, 2025-2026, Master semester 4 Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Master semestre 4 MA4 ETE Master semester 4 MA4 Science et ingénierie quantiques SIQ Quantum Science and Engineering SIQ
Science et ingénierie quantiques SIQ Quantum Science and Engineering SIQ
B optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
Biologie computationnelle et quantitative (edoc), 2025-2026 Computational and Quantitative Biology (edoc), 2025-2026 Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Biologie computationnelle et quantitative (edoc) EDCB Computational and Quantitative Biology (edoc) EDCB
optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
Mineur en Imaging, 2025-2026, Semestre printemps Minor in Imaging, 2025-2026, Spring semester Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Semestre printemps E ETE Spring semester E Mineur en Imaging MIN_IMG Minor in Imaging MIN_IMG
optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
Mineur en Microtechnique, 2025-2026, Semestre printemps Microengineering minor, 2025-2026, Spring semester Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Semestre printemps E ETE Spring semester E Mineur en Microtechnique MIN_MT Microengineering minor MIN_MT
optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
Mineur en Science et ingénierie quantiques, 2025-2026, Semestre printemps Minor in Quantum Science and Engineering, 2025-2026, Spring semester Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Semestre printemps E ETE Spring semester E Mineur en Science et ingénierie quantiques MIN_SIQ Minor in Quantum Science and Engineering MIN_SIQ
optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
Mineur en Technologies spatiales, 2025-2026, Semestre printemps Space Technologies minor, 2025-2026, Spring semester Ecole polytechnique fédérale de Lausanne EPFL Ecole polytechnique fédérale de Lausanne EPFL 2025-2026 Semestre printemps E ETE Spring semester E Mineur en Technologies spatiales MIN_TEC_SPACE Space Technologies minor MIN_TEC_SPACE
optionnel optional
2 Cours Courses Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
1 Exercices Exercises Heure(s) hebdo x 14 semaines Hour(s) per week x 14 weeks H hebdo H hebdo Charbon Edoardo 146991
Microtechnique MT Microengineering MT
Fantner Georg 199129
Ingénierie des sciences du vivant SV Life Sciences Engineering SV
Bruschini Claudio 109304
Microtechnique MT Microengineering MT
2343840776 Metrology Metrology 3
Ecrit Written Crédit Credits 3 Session été Session summer ETE ETE
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